most citedAnalysis of polysilicon micro beams buckling with temperature-dependent properties

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cs.OH2008★ 9 cited

Analysis of polysilicon micro beams buckling with temperature-dependent properties

M. Shamshirsaz, M. Bahrami, M. B. Asgari +1

The suspended electrothermal polysilicon micro beams generate displacements and forces by thermal buckling effects. In the previous electro-thermal and thermo-elastic models of sus…