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Showing 2012 · cond-mat.mtrl-sciShow all
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cond-mat.mtrl-sci2012★ 12 cited
Anisotropic Vapor HF etching of silicon dioxide for Si microstructure release
Vikram Passi, Ulf Sodervall, Bengt Nilsson +6
Damages are created in a sacrificial layer of silicon dioxide by ion implantation to enhance the etch rate of silicon-dioxide in liquid and vapor phase hydrofluoric acid. The etch…
cond-mat.mtrl-sci2012★ 15 cited
Noninvasive Embedding of Single Co Atoms in Ge(111)2x1 Surfaces
D. A. Muzychenko, K. Schouteden, M. Houssa +2
We report on a combined scanning tunneling microscopy (STM) and density functional theory (DFT) based investigation of Co atoms on Ge(111)2x1 surfaces. When deposited on cold surfa…