75 citations
2 papers
physics.app-ph2019★ 8 cited
Large-area implementation and critical evaluation of the material and fabrication aspects of a thin-film thermoelectric generator based on aluminum-doped zinc oxide
Kirsi Tappura, Taneli Juntunen, Kaarle Jaakkola +4
A large-area thermoelectric generator (TEG) utilizing a folded thin-film concept is implemented and the performance evaluated for near room temperature applications having modest t…
cond-mat.mtrl-sci2017★ 75 cited
Structural, Chemical and Optical Properties of Cerium Dioxide Film Prepared by Atomic Layer Deposition on TiN and Si Substrates
S. Vangelista, R. Piagge, S. Ek +4
Thin films of cerium dioxide (CeO2) were deposited by atomic layer deposition (ALD) at 250 °C on both Si and TiN substrates. The ALD growth produces CeO2 films with polycrystalline…