218 citations
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nlin.CD2020★ 10 cited
Impulse control of chaos in the flexible shaft rotating-lifting system of the mono-silicon crystal puller
Zi-Xuan Zhou, Celso Grebogi, Hai-Peng Ren
Chaos is shown to occur in the flexible shaft rotating-lifting (FSRL) system of the mono-silicon crystal puller. Chaos is, however, harmful for the quality of mono-silicon crystal…
nlin.CD2019★ 9 cited
Nonlinear dynamics in the flexible shaft rotating-lifting system of silicon crystal puller using Czochralski method
Hai-Peng Ren, Zi-Xuan Zhou, Celso Grebogi
Silicon crystal puller (SCP) is a key equipment in silicon wafer manufacture, which is, in turn, the base material for the most currently used integrated circuit (IC) chips. With t…