most citedStriations in electronegative capacitively coupled radio-frequency plasmas: analysis of the pattern formation and the effect of the driving frequency

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physics.plasm-ph2017★ 40 cited

Striations in electronegative capacitively coupled radio-frequency plasmas: analysis of the pattern formation and the effect of the driving frequency

Yong-Xin Liu, Ihor Korolov, Edmund Schüngel +3

Self-organized striated structures of the plasma emission have recently been observed in capacitive radio-frequency CF4 plasmas by Phase Resolved Optical Emission Spectroscopy (PRO…