178 citations
Counting papers with at most 25 authors, so collaboration author lists do not stand in for the people here.
- University of CopenhagenDK17 papers
- Technical University of DenmarkDK13 papers
- Statistics DenmarkDK7 papers
- Delft University of TechnologyNL3 papers
- Indiana UniversityUS3 papers
- Indiana University BloomingtonUS3 papers
- Aarhus UniversityDK2 papers
- Ben-Gurion University of the NegevIL2 papers
- Centre National de la Recherche ScientifiqueFR2 papers
- Chalmers University of TechnologySE2 papers
- DHIDK2 papers
- Laboratoire Temps EspaceFR2 papers
Showing 2015 · physics.ins-detShow all
2 papers · 2 filters
physics.ins-det2015★ 7 cited
Alignment free characterization of 2D gratings
Morten Hannibal Madsen, Pierre Boher, Poul-Erik Hansen +1
Fast characterization of 2-dimensional gratings is demonstrated using a Fourier lens optical system and a differential optimization algorithm. It is shown that both the grating spe…
physics.ins-det2015★ 29 cited
Imaging Scatterometry
Morten Hannibal Madsen, Poul-Erik Hansen
We present an optical metrology system for characterization of topography of micro/nano-structures on a surface or embedded in a semi-transparent material. Based on the principles…