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20102026
most citedThe Large Hadron-Electron Collider at the HL-LHC

244 citations

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Showing 2014Show all

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cs.AR2014★ 5 cited

A High-Performance Triple Patterning Layout Decomposer with Balanced Density

Bei Yu, Yen-Hung Lin, Gerard Luk-Pat +3

Triple patterning lithography (TPL) has received more and more attentions from industry as one of the leading candidate for 14nm/11nm nodes. In this paper, we propose a high perfor…