Gigahertz-Frequency, Acousto-Optic Phase Modulation of Visible Light in a CMOS-Fabricated Photonic Circuit

Jacob M. Freedman, Matthew J. Storey, Daniel Dominguez +4

Here we present an efficient, visible-light, gigahertz-frequency acousto-optic modulator fabricated on a 200 mm wafer in a volume CMOS foundry. Our device combines a piezoelectric…