papers
Publications (3)
physics.ins-det2018
High Performance, Continuously Tunable Microwave Filters using MEMS Devices with Very Large, Controlled, Out-of-Plane Actuation
Jackson Chang, Michael Holyoak, George Kannell +3
Software defined radios (SDR) in the microwave X and K bands offer the promise of low cost, programmable operation with real-time frequency agility. However, the real world in whic…
physics.ins-det2016
High speed control of electro-mechanical transduction Advanced Drive Techniques for Optimized Step-and-Settle Response of MEMS Micromirrors
Matthias Imboden, Jackson Chang, Corey Pollock +6
Micro/Nano Electro Mechanical Systems (MEMS/NEMS) provide the engineer with a powerful set of solutions to a wide variety of technical challenges. However, because they are mechani…
cond-mat.mes-hall2013
Atomic Calligraphy: The Direct Writing of Nanoscale Structures using MEMS
Matthias Imboden, Han Han, Jackson Chang +4
We present a micro-electromechanical system (MEMS) based method for the resist free patterning of nano-structures. Using a focused ion beam (FIB) to customize larger MEMS machines,…