Mini-MALTA: Radiation hard pixel designs for small-electrode monolithic CMOS sensors for the High Luminosity LHC

Abstract

Depleted Monolithic Active Pixel Sensor (DMAPS) prototypes developed in the TowerJazz 180 nm CMOS imaging process have been designed in the context of the ATLAS upgrade Phase-II at the HL-LHC. The pixel sensors are characterized by a small collection electrode (3 $\hat{I}¼$m) to minimize capacitance, a small pixel size ($36.4\times 36.4$ $\hat{I}¼$m), and are produced on high resistivity epitaxial p-type silicon. The design targets a radiation hardness of $1\times 10^{15}$ 1 MeV n${}_{eq}$/cm${}^2$, compatible with the outermost layer of the ATLAS ITK Pixel detector. This paper presents the results from characterization in particle beam tests of the Mini-MALTA prototype that implements a mask change or an additional implant to address the inefficiencies on the pixel edges. Results show full efficiency after a dose of $1\times 10^{15}$ 1 MeV n${}_{eq}$/cm${}^2$.